JPH0345414Y2 - - Google Patents

Info

Publication number
JPH0345414Y2
JPH0345414Y2 JP19688886U JP19688886U JPH0345414Y2 JP H0345414 Y2 JPH0345414 Y2 JP H0345414Y2 JP 19688886 U JP19688886 U JP 19688886U JP 19688886 U JP19688886 U JP 19688886U JP H0345414 Y2 JPH0345414 Y2 JP H0345414Y2
Authority
JP
Japan
Prior art keywords
reservoir
heater
liquid metal
support rod
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19688886U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63101452U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19688886U priority Critical patent/JPH0345414Y2/ja
Publication of JPS63101452U publication Critical patent/JPS63101452U/ja
Application granted granted Critical
Publication of JPH0345414Y2 publication Critical patent/JPH0345414Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP19688886U 1986-12-22 1986-12-22 Expired JPH0345414Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19688886U JPH0345414Y2 (en]) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19688886U JPH0345414Y2 (en]) 1986-12-22 1986-12-22

Publications (2)

Publication Number Publication Date
JPS63101452U JPS63101452U (en]) 1988-07-01
JPH0345414Y2 true JPH0345414Y2 (en]) 1991-09-25

Family

ID=31156105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19688886U Expired JPH0345414Y2 (en]) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPH0345414Y2 (en])

Also Published As

Publication number Publication date
JPS63101452U (en]) 1988-07-01

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